Design Chalenges for Stepper Motor Actuated Microvavle Based on Fine and Micro-machining
نویسندگان
چکیده
⎯ we present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.. .
منابع مشابه
Stepper Motor Actuated Microvalve
We present the design, fabrication and characterization of a novel microvalve realized by combining micro and fine machining techniques. The design is for high flow rates at high pressure difference between inlet and outlet, burst pressure of up to 15 bars, there is no power consumption required for the valve to maintain its position during operation in any intermediate state and the process ga...
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